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リング積層ピエゾアクチュエーター(高速応答用）
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Nominal operating voltage:500 V | ||||
Type HPSt |
Excursion at 500 V (μm） |
Length L(mm） |
Low/high field¹ capacitance (ｎF） |
Compressive³ stiffness (N/μm） |
Resonant³ frequency (kHz) |
価格（円） |
| 500/15-8/2 500/15-8/5 500/15-8/15 500/15-8/25 |
2 5 15 25 |
4 8 15 25 |
170/350 170/350 350/700 600/1200 |
250 250 120 90 |
50 50 25 10 |
50,000 55,000 65,000 90,000 |
円柱積層ピエゾアクチュエーター
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型式 | サイズ | ストローク(nm)＆価格(万円） | ||||||
| X | Y | 5 | 7 | 15 | 25 | 35 | 50 | ||
| PST-150/4/L | 5 | 5 | 2.5 | 2.7 | |||||
| PST-150/5/L | 8 | 5 | 2.5 | 2.7 | 4.9 | ||||
| PST-150/7/L | 8 | 8 | 2.9 | 3.5 | 5.9 | ||||
| PST-150/5L | 8 | 5 | 3.0 | 4.0 | 9.9 | ||||
| PST-150/10/L | 13 | 10 | 3.0 | 4.0 | 6.5 | 9.9 | |||
| PST-150/5/L | 8 | 5 | 3.0 | 4.0 | 5.2 | 6.5 | |||
| PST-150/10/L | 13 | 10 | 2.7 | 3.6 | 5.2 | 6.5 | |||
ピエゾ電源 Technical data for individual channel
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Number of independent channels | 3 |
| Voltage range by amplifier mode | -100 V thru +500 V | |
| Voltage range by manual mode | -100 V thru +500 V | |
| Noise(positioning relevant) (with MAX. load 100nF) |
1 mV equivalent a fluctuation in position of 0.03nm for a 500V/15μm stroke actuator like PSt 500/10/15 |
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| Input signal | -1 V thru +5 V or-2 V thru +10 V | |
| Input impedance | 10 kOhm | |
| Gain Factor | 100 | |
| Max / average current | 15 mA | |
| Average power | 7 Watts | |
| Device bandwidth(open output) | 20 kHz | |
| Bandwidth with MAX. load | like SQV 3/500 amplifier (see main brochure) | |
| Current limitation | short circuit proof | |
| Dimensions | H X W X D 160 X 250 X 350 mm | |
| Weight | 3 kg | |
| Line voltage | 115/60 Hz 230/50 Hz | |
| Input connectors | BNC | |
| Monitor connectors | BNC | |
| Output connectors | BNC, optionally LEMOSA OS.250 |
